We are a leading company in vacuum and planarization technologies that support state-of-the-art manufacturing sites. EBARA has the second largest share of the global market for dry vacuum pumps and chemical mechanical polishing (CMP) systems, which are essential for semiconductor manufacturing, and also supplies various products such as exhaust abatement systems, ozonized water generators, and precision chillers. Our highly sophisticated and reliable global support system has made us the preferred supplier for the manufacturing industry and for R&D applications including for solar panel, chemical, pharmaceutical, and other industries.
Our dry vacuum pumps, with noncontact construction, are indispensable in building clean vacuum environments. They play an active role in many different fields, particularly semiconductor manufacturing processes.
EBARA manufactures high throughput CMP systems, bevel polishing systems with superior polishing performance, and plating systems that allow flexible configurations, which are essential in the manufacture of precision, highly integrated semiconductors. EBARA supplies semiconductor manufacturing equipment to the world’s major semiconductor manufacturers.
Exhaust abatement systems are abatement systems that detoxify the harmful gases generated in manufacturing processes, such as perfluorocarbons (PFCs), toxic gases, and VOCs, and release them into the atmosphere. EBARA’s exhaust abatement systems can treat even PFCs, which are difficult to abate, with high efficiency.
Ozonized water is a powerful oxidizing agent obtained by dissolving ozone (O3) into water. EBARA’s ozonized water generators are able to produce ozonized water at high concentrations and with high concentration stability. They contribute to the improvement of processing efficiency and purity.
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